Top 7 China Semiconductor Equipment Companies 2025
China's semiconductor equipment market exceeded RMB 300 billion in 2025, driven by massive domestic capacity expansion and import substitution requirements. US and allied export controls restricting advanced equipment (EUV lithography, advanced etching) to China have accelerated domestic equipment development. Chinese equipment companies have achieved significant breakthroughs in etching (AMEC), thin film deposition (NAURA), and cleaning equipment, though lithography remains the most challenging segment.
TL;DR: China's semiconductor equipment market exceeds RMB 300B. AMEC leads etching with 5nm process capability while NAURA provides 40%+ of China's domestic deposition equipment. Domestic equipment substitution reached 35%+ of China's equipment purchases.
Top Companies
AMEC (中微半导体)
5nm etching capabilityAMEC (Advanced Micro-Fabrication Equipment) is China's leading etching equipment company, with its CCP and ICP etching tools capable of 5nm process nodes. Its etchers are used by TSMC, Samsung, and major Chinese fabs, with 30%+ of China's etching equipment market share.
NAURA Technology (北方华创)
40%+ domestic deposition shareNAURA is China's largest semiconductor equipment company, providing etching, PECVD, LPCVD, ALD, and furnace equipment. It holds 40%+ domestic market share in deposition equipment and supplies all major Chinese fabs including SMIC, Hua Hong, and Nexchip.
Nexchip Equipment (芯碁微装)
Direct imaging lithographyNexchip develops direct imaging (DI) lithography equipment for PCB and packaging applications. Its equipment is widely used in China's IC substrate and advanced packaging industry, and it is expanding into maskless lithography for semiconductor manufacturing.
Kingsemi (晶盛机电)
Crystal growth + furnacesKingsemi is China's leading semiconductor crystal growth equipment manufacturer, providing Czochralski pullers for silicon ingots, silicon carbide crystal growth furnaces, and wafer processing equipment. Its equipment is used by 80%+ of China's silicon wafer manufacturers.
ACM Research (盛美半导体)
Cleaning equipment leaderACM Research specializes in semiconductor cleaning equipment including single-wafer and batch cleaning tools. Its proprietary Space Alternating Phase Shift (SAPS) technology achieves superior cleaning performance, with tools deployed at major Chinese and international fabs.
Huahai Qingke (华海清科)
CMP equipment leaderHuahai Qingke is China's leading CMP (Chemical Mechanical Planarization) equipment manufacturer, providing polishing tools for both front-end and back-end semiconductor manufacturing. Its CMP tools are used by SMIC and major Chinese fabs, achieving 28nm process node qualification.
Mattson Technology (Mattson/中国)
Thermal processingMattson Technology (acquired by Chinese investors) provides thermal processing equipment including rapid thermal processing (RTP) and furnace annealing tools. Its equipment serves China's mature-node semiconductor manufacturing, with focus on cost-effective solutions for 28nm and above.
Comparison Table
| Company | Equipment Type | Process Node | Market Share (China) | Global Clients |
|---|---|---|---|---|
| AMEC | Etching (CCP/ICP) | 5nm capable | 30%+ etching | TSMC, Samsung |
| NAURA | Etch + Deposition | 14nm domestic | 40%+ deposition | Chinese fabs |
| Nexchip | DI lithography | Advanced packaging | PCB + packaging | IC substrate makers |
| Kingsemi | Crystal growth | Materials | 80%+ Si wafer | Chinese wafer makers |
| ACM Research | Cleaning | Advanced nodes | 25%+ cleaning | Chinese + global |
| Huahai Qingke | CMP | 28nm qualified | 40%+ CMP | SMIC, Chinese fabs |
| Mattson | Thermal processing | 28nm+ | Growing | Chinese fabs |
Frequently Asked Questions
How much semiconductor equipment does China import?
China imports USD 35B+ of semiconductor equipment annually (2024), making it the world's largest equipment buyer. Despite growing domestic capability, China still imports 65%+ of its equipment needs, particularly in lithography (ASML dominance), advanced inspection (KLA), and test (Teradyne, Advantest).
How is China's domestic equipment substitution progressing?
Domestic equipment substitution reached 35%+ of China's total equipment purchases in 2024, up from 20% in 2022. Etching leads at 50%+ domestic share, deposition at 40%+, cleaning at 35%+, CMP at 40%+, and thermal processing at 30%+. Lithography, inspection, and test remain below 10% domestic share.
What is China's lithography equipment status?
China's lithography remains the most challenging segment. SMEE (Shanghai Micro Electronics Equipment) produces DUV-like lithography tools at 90nm nodes for mature applications and IC packaging. EUV lithography is not available to China due to Dutch export controls. Chinese research institutions are exploring alternative approaches including electron beam lithography and nanoimprint.
Which Chinese equipment company is closest to international leaders?
AMEC is closest to international parity in etching, with tools comparable to Lam Research at 5nm nodes. NAURA approaches Applied Materials in deposition for mature nodes. ACM Research's cleaning technology is competitive with DNS (Screen) and TEL. However, no Chinese company matches ASML in lithography or KLA in inspection.
How will export controls affect China's equipment industry?
US and allied export controls (CHIP 4 Alliance) restrict advanced equipment to China, which paradoxically benefits domestic equipment makers by creating captive demand. Chinese fabs are actively qualifying domestic alternatives, providing critical field data for improvement. Long-term, controls may slow China's most advanced node development but accelerate domestic equipment industry growth.