Top 7 China Vacuum Equipment Companies 2025
China's vacuum equipment industry, valued at approximately CNY 85 billion, provides vacuum pumps, vacuum coating systems, vacuum furnaces, and leak detectors for semiconductor fabrication, flat panel display manufacturing, photovoltaics, and metallurgical heat treatment. The construction of new semiconductor fabs and solar cell production lines has driven strong demand for dry vacuum pumps and magnetron sputtering systems. Domestic vacuum pump manufacturers have made significant progress in closing the technology gap with Edwards, Pfeiffer, and ULVAC.
Edwards China (now Atlas Copco)
CNY 6.8B revenue
Edwards is the dominant vacuum pump supplier for semiconductor etch and CVD processes in China. Their iXH and nXDS dry pump series are specified in SMIC, Hua Hong, and Yangtze Memory Technologies fabs.
Shanghai Hanbell (Hanbell Vacuum)
CNY 4.2B revenue
Hanbell produces scroll vacuum pumps and screw vacuum pumps for semiconductor, photovoltaic, and coating applications. Their oil-free scroll pumps are an emerging alternative for load-lock and transfer chamber vacuum.
Leybold China (now Busch Group)
CNY 3.8B revenue
Leybold operates a major vacuum technology center in China, offering turbomolecular pumps, dry screw pumps, and vacuum gauges. Their TW and MAG series serve research and industrial coating applications.
Zhejiang Baisheng Vacuum
CNY 2.1B revenue
Baisheng specializes in rotary vane vacuum pumps and vacuum coating systems for optical lens, decorative, and tool coatings. Their magnetron sputtering systems are deployed in over 500 coating lines nationwide.
Chengdu Zhengzhou Vacuum
CNY 1.8B revenue
Zhengzhou Vacuum produces vacuum brazing furnaces and vacuum heat treatment furnaces for aerospace, automotive, and tool steel industries. Their furnaces achieve uniformity within plus or minus 3 degrees Celsius at 1300 degrees Celsius.
Shanghai Jipu Vacuum
CNY 1.5B revenue
Jipu provides vacuum distillation systems and vacuum drying equipment for pharmaceutical, chemical, and food industries. Their falling film evaporators serve lactose and MSG production plants.
Beijing Sevenstar Electronics (CSIC)
CNY 2.4B revenue
Sevenstar produces cryogenic pumps, ion pumps, and vacuum measurement instruments for semiconductor and space simulation. Their cryopumps are used in Chinese semiconductor R&D lines and space environment test chambers.
Comparison Table
| Company | HQ | Key Products | Focus |
|---|---|---|---|
| Edwards (Atlas Copco) | Shanghai | Dry Vacuum Pumps | Semiconductor Etch/CVD |
| Hanbell Vacuum | Shanghai | Scroll/Screw Pumps | Semiconductor/PV |
| Leybold (Busch) | Shanghai | Turbo/Screw Pumps | Research/Coating |
| Baisheng Vacuum | Wenzhou | Coating Systems | Optical/Decorative |
| Zhengzhou Vacuum | Zhengzhou | Vacuum Furnaces | Aerospace Heat Treatment |
| Jipu Vacuum | Shanghai | Vacuum Distillation | Pharma/Chemical |
| Sevenstar Electronics | Beijing | Cryo/Ion Pumps | Space/Semiconductor |
Frequently Asked Questions
How large is China's vacuum equipment market?
China's vacuum equipment market reached approximately CNY 85 billion in 2024. Semiconductor applications account for approximately 35%, photovoltaics 20%, flat panel display 15%, metallurgical heat treatment 15%, and other industrial applications 15%.
Which Chinese companies compete with Edwards and Leybold?
Hanbell is the leading domestic competitor in the scroll and screw vacuum pump segment, while Sevenstar Electronics produces cryogenic pumps for semiconductor R&D. Both are gaining traction in non-critical vacuum applications as domestic alternatives to imported brands.
What vacuum technologies are most demanded for semiconductor fabs?
Dry vacuum pumps for etch and CVD processes are the highest-value segment, dominated by Edwards. Turbomolecular pumps for high-vacuum chambers, cryogenic pumps for load-lock, and leak detectors for chamber integrity testing are also in strong demand with new fab construction.
How is China's vacuum coating industry developing?
Baisheng Vacuum and other coating system manufacturers have deployed over 500 magnetron sputtering lines for decorative, optical, and tool coatings. Growing demand for AR/VR lens coatings, automotive decorative trim, and architectural glass low-E coatings continues to drive investment.
What role does vacuum equipment play in China's energy transition?
Vacuum furnaces are critical for heat treatment of wind turbine gears and EV motor components. Vacuum insulation panels for building energy efficiency and vacuum degassing for transformer oil are emerging applications driving demand in the green energy sector.